发明名称 |
System for and method of processing substrate |
摘要 |
A reference command value is transmitted from an apparatus server (90) through a network (96d) to spin processing units (SR1-SR4) of a substrate processing apparatus (1). Next, a plurality of correction amounts for making processing states in the respective spin processing units (SR1-SR4) substantially the same are computed from a plurality of measured values corresponding to the respective spin processing units (SR1-SR4) and the reference command value, and are additionally stored in a correction amount database (90a). For execution of substrate processing, a plurality of correction amounts corresponding to the reference command value are extracted from the database, and corresponding ones of the correction amounts plus the reference command value are transmitted to the respective spin processing units (SR1-SR4).
|
申请公布号 |
US6807455(B2) |
申请公布日期 |
2004.10.19 |
申请号 |
US20030459833 |
申请日期 |
2003.06.11 |
申请人 |
DAINIPPON SCREEN MFG. CO. LTD. |
发明人 |
YOSHIDA TAKUSHI;HAMADA TETSUYA |
分类号 |
G06F19/00;H01L21/00;(IPC1-7):G06F19/00 |
主分类号 |
G06F19/00 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|