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发明名称
SEMICONDUCOR FABRICATING PROCESS CHAMBER
摘要
申请公布号
KR20060034532(A)
申请公布日期
2006.04.24
申请号
KR20040083692
申请日期
2004.10.19
申请人
SAMSUNG ELECTRONICS CO., LTD.
发明人
LEE, SANG JIN
分类号
H01L21/3065;H01L21/205
主分类号
H01L21/3065
代理机构
代理人
主权项
地址
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