发明名称 Method for forming a quartz crystal vibrator
摘要 A quartz crystal tuning fork vibrator having thin conductive film side electrodes and a method of forming same is provided. The quartz crystal vibrator is provided with identically configured electrodes on both planar surfaces of the tuning fork tines with the electrodes being peripherally positioned along the respective lengthwise extents of the tines on both planar surfaces with thin conductive film electrodes being disposed on the lengthwise side surfaces of the tines in order to electrically couple the like configured electrodes peripherally disposed on the planar surfaces to each other. The quartz crystal plate and the electrodes formed on the opposed planar surfaces of the tines are formed by photo-etching, whereafter the planar surfaces are masked and a thin conductive film is sputtered on the lengthwise edges to form the electrodes on the side surfaces.
申请公布号 US4176030(A) 申请公布日期 1979.11.27
申请号 US19780900222 申请日期 1978.04.26
申请人 MATSISHIMA KOGYO K K 发明人 NEGITA, MUTSUMI
分类号 H01L41/08;H01L41/22;H03H3/02;H03H9/215;(IPC1-7):C23C15/00 主分类号 H01L41/08
代理机构 代理人
主权项
地址