SCANNING ELECTRON MICROSCOPE,申请号JP19780058485-传众专利搜索

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发明名称	SCANNING ELECTRON MICROSCOPE
摘要
申请公布号	JPS54149568(A)	申请公布日期	1979.11.22
申请号	JP19780058485	申请日期	1978.05.17
申请人	NIPPON ELECTRON OPTICS LAB	发明人	HIRATA YOSHIHIRO;UCHIUMI HIROSHI;OBARA YOUICHI
分类号	H01J37/22;H01J37/15;H01J37/28	主分类号	H01J37/22
代理机构		代理人
主权项
地址

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