| 摘要 |
The invention relates to a nanorobot module with a measuring device for measuring spatial surface properties with a measuring in the centimetre range and a resolution in the nanometre range which can be arranged in a vacuum chamber, for example, the vacuum chamber of a microscope. In addition to the integration of the nanorobot module in a vacuum chamber, the invention further relates to the automation of the module in the chamber system, in particular, the connection of the control of the nanorobot system and chamber system by providing an interface between both systems. The invention also relates to a mechatronic exchange adapter for the flexible fixing of nanorobot modules within a vacuum chamber, in particular an exchange adapter which preferably connects a nanorobot module in a working stage and mechanically locates the same with high precision without play. |
