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发明名称
METHOD OF AND DEVICE FOR ALIGNING CHIPS
摘要
申请公布号
JPS54148478(A)
申请公布日期
1979.11.20
申请号
JP19780057436
申请日期
1978.05.15
申请人
STANLEY ELECTRIC CO LTD
发明人
MORI KIJIYUU
分类号
H01L21/68;H01L21/301;H01L21/50
主分类号
H01L21/68
代理机构
代理人
主权项
地址
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