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发明名称
DURCHLAUF-HEIZEINRICHTUNG FUER DISKONTINUIERLICHEN BETRIEB ALS VORSCHALTEINRICHTUNG FUER VAKUUMBESCHICHTUNGSANLAGEN
摘要
申请公布号
DE2820286(A1)
申请公布日期
1979.11.15
申请号
DE19782820286
申请日期
1978.05.10
申请人
LEYBOLD-HERAEUS GMBH
发明人
AICHERT,HANS,DR.-ING.;HOFFMANN,OTTO-HORST,DR.-ING.;STARK,FRIEDRICH;STEPHAN,HERBERT,DR.-PHYS.
分类号
C23C14/54;C23C16/54;(IPC1-7):C23C13/08;C23C15/00
主分类号
C23C14/54
代理机构
代理人
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地址
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