| 摘要 |
PURPOSE:To prevent the practical increment of electrode length in the transfer direction conversion part to improve a transfer efficiency by dividing the transfer electrode in the width direction and performing transfer for every divided part. CONSTITUTION:N<+> channel stop 9 is provided on p-type Si substrate 20, and gate electrode 22 such as Al is provided through SiO2 21. Layer 23 is a potential well. Thus, when width W of electrode 8 is devided by channel stop 9 to make the width of divided electrodes equal to electrode length L, the deterioration of a transfer efficiency is not generated because the practical electrode length in the transfer direction is equal to L, for example, between electrodes a11 and a12 and between 122 and a23. By this methode, the charge injected to 8 passes through a long transfer stage and is outputted to 10, and the transfer time is not shifted due to the same channel length in case of the even number of floding times. Since the channel is analyzed in the direction vertical to the transfer direction in this manner, the transfer capacity is not changed in the direction conversion part of multistage CCD formed zigzag, and no complicated-structure electrode and diffusion layer are required, and the transfer efficiency and the transfer time are improved. |
