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发明名称
MANUFACTURE FOR SEMICONDUCTOR ELEMENT
摘要
申请公布号
JPS54115070(A)
申请公布日期
1979.09.07
申请号
JP19780023259
申请日期
1978.02.28
申请人
MITSUBISHI ELECTRIC CORP
发明人
KAWAKAMI AKIRA;NAKAGAWA TSUTOMU
分类号
H01L21/52;H01L21/58
主分类号
H01L21/52
代理机构
代理人
主权项
地址
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