摘要 |
The invention concerns devices for use in magnetic field sensors, of the kind incorporating a p-n-p-n structure of circular geometry, within which there may be formed a carrier domain which will, when an appropriate magnetic field is applied, rotate around the centre of the structure at a frequency dependent on the flux density. To achieve high sensitivity for field measurement, there is adopted a p-n-p-n structure whose four regions (2,3,4,5) are all bounded by a planar surface (1) of the semiconductor, the structure having one end region (3) centrally disposed and the other (5) forming an annular intrusion into the adjacent intermediate region (4), which is also annular and has contact made to it only outwardly of the annular end region (5). The structure may be fabricated by diffusion, and has an associated electrode system preferably providing plural contacts to at least one of the intermediate regions (2,4). Various ways of utilising such a device are disclosed. |