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发明名称
摘要
申请公布号
DE2550814(C3)
申请公布日期
1979.08.09
申请号
DE19752550814
申请日期
1975.11.12
申请人
ERWIN SICK GMBH OPTIK-ELEKTRONIK, 7808 WALDKIRCH
发明人
SICK, ERWIN, 8021 ICKING
分类号
H01L21/66;D06H3/08;G01N21/86;G01N21/89;G01N21/892;G01N21/896;G01N21/898;(IPC1-7):G02B27/17;G01N21/32
主分类号
H01L21/66
代理机构
代理人
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地址
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