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发明名称
PREPARATION OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPS5498186(A)
申请公布日期
1979.08.02
申请号
JP19780004934
申请日期
1978.01.19
申请人
NIPPON ELECTRIC CO
发明人
NOZAKI TADATOSHI;OKABAYASHI HIDEKAZU
分类号
H01L29/78;H01L21/28;H01L29/417
主分类号
H01L29/78
代理机构
代理人
主权项
地址
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