| 摘要 |
PURPOSE:To prevent corrosion of an adjacent electrode basing upon the vaporing of an absorptive substance due to coating and also to uniform quality by forming an exciting-receiving electrode and plating electrode on a substrate surface at the same time and by electrically plating the plating electrode with a soft metal layer. CONSTITUTION:On the surface of LiNbO3 single-crystal plate 10 of thickness 0.5mm with one surface mirror-polished, gold 11 is vapor-deposited to a thickness of 2000Angstrom . Through photoetching, exciting-receiving electrodes 12 and 13, and plated electrode 14 are formed. With plating electrode 14 taken as a cathode, lead, for example, is used as an anode to carry out electric plating by a boride-fluoride solder plating method, thereby forming solder metal layer 15 of thickness of 100mum. In this way, exciting-receiving electrodes 12 and 13, and plating electrode 15 are formed on the substrate surface at the same time, and soft metal layer 15 absorbing elastic surface waves is on plating electrode 14, so that the amount can be uniformed and the shape can also be fixed easily in comparison with a conventional absorptive- substance coating method. In addition, the risk of the corrosion of the adjacent electrode through the vaporing of the organic matter of the absorptive substance can also be eliminated. |
