PRODUCTION OF SEMICONDUCTOR DEVICE,申请号JP19780000747-传众专利搜索

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发明名称	PRODUCTION OF SEMICONDUCTOR DEVICE
摘要
申请公布号	JPS5493957(A)	申请公布日期	1979.07.25
申请号	JP19780000747	申请日期	1978.01.06
申请人	MITSUBISHI ELECTRIC CORP	发明人	OOGA HIROTOMO;TSUKAMOTO KATSUHIRO
分类号	H01J37/317;H01J37/30;H01L21/265	主分类号	H01J37/317
代理机构		代理人
主权项
地址

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