首页
产品
黄页
商标
征信
会员服务
注册
登录
全部
|
企业名
|
法人/股东/高管
|
品牌/产品
|
地址
|
经营范围
发明名称
Toroidal low-field reactive gas source
摘要
申请公布号
EP1313132(B1)
申请公布日期
2010.10.20
申请号
EP20030002617
申请日期
1998.06.23
申请人
MKS INSTRUMENTS, INC.
发明人
SMITH, DONALD, K.;CHEN, XING;HOLBER, WILLIAM;GEORGELIS, ERIC
分类号
H01J37/32;H05H1/46;H01J27/16;H01L21/205;H01L21/302;H01L21/3065
主分类号
H01J37/32
代理机构
代理人
主权项
地址
您可能感兴趣的专利
PRODUCTION OF RESIST PATTERN, FORMATION OF BARRIER RIB OF PLASMA DISPLAY PANEL AND PRODUCTION OF PLASMA DISPLAY PANEL
PHOTOSENSITIVE RESIN COMPOSITION
PARALLEL LIGHT POLARIZING CONVERSION DEVICE, LIGHTING DEVICE, AND LIQUID CRYSTAL PROJECTOR
ELECTRONIC APPARATUS, CONTROL METHOD THEREFOR, AND STORAGE MEDIUM
INTER-AGENT MESSAGE VISUALIZING DEVICE FOR MULTI-AGENT SYSTEM
FOOT-OPERATED INPUT DEVICE FOR PERSONAL COMPUTER
INTER-CONNECTOR, ITS FORMING METHOD AND ITS JOINING DEVICE
DUST REMOVING METHOD
RECORDER
MAGNETIC RECORDING AND REPRODUCING DEVICE
INPUT DEVICE
SOLAR CELL
REMOTE CONTROL SYSTEM AND RECORDING AND REPRODUCING DEVICE
DC SUPPLYING DEVICE
CONDUCTOR CONNECTOR
FIXED CURRENT DETECTOR
OPTICAL SENSOR
DELAY SYNCHRONIZING LOOP AND DRIVING METHOD THEREFOR
DETECTING APPARATUS FOR NEUTRAL POSITION OF POTENTIOMETER
WIRING BOARD CONTAINING CAPACITOR