| 发明名称 |
A METHOD OF FORMING A POLYMER FILM |
| 摘要 |
<p>A method of forming a polymer film containing metal therein includes the steps of providing an electrode of a metal that can be etched by a halogen, providing a substrate for the polymer film to be deposited thereon, and passing a halocarbon monomer through a plasma system so that the metal etched from the electrode forms a volatile halide and is incorporated in the polymer film that is deposited on the substrate.</p> |
| 申请公布号 |
EP0002889(A3) |
申请公布日期 |
1979.07.25 |
| 申请号 |
EP19780300702 |
申请日期 |
1978.12.01 |
| 申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
COBURN, JOHN WYLLIE;KAY, ERIC |
| 分类号 |
C08F14/00;B05D7/24;C08F2/00;C08F2/52;C08F8/00;C08F8/42;C23C14/02;(IPC1-7):08F2/52;05D7/24 |
主分类号 |
C08F14/00 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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