发明名称 Semiconductor device with silicon carbide-glass-silicon carbide passivating overcoat
摘要 A semiconductor device includes a semiconductor substrate and a silicon carbide film formed in direct contact with the surface of the semiconductor substrate. The silicon carbide film may have a proper purity or include at least one element selected from the group consisting of hydrogen, oxygen, nitrogen, helium, argon or chlorine.
申请公布号 US4161743(A) 申请公布日期 1979.07.17
申请号 US19780915541 申请日期 1978.06.14
申请人 TOKYO SHIBAURA ELECTRIC CO LTD 发明人 AJIMA, TAKASHI;UCHIDA, MASATO;YONEZAWA, TOSHIO
分类号 H01L21/314;H01L21/316;H01L23/29;H01L23/31;(IPC1-7):H01L29/34 主分类号 H01L21/314
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