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发明名称
DETECTION METHOD OF INTEGRATED CIRCUIT INSERTION DIRECTION
摘要
申请公布号
JPS5483381(A)
申请公布日期
1979.07.03
申请号
JP19770150529
申请日期
1977.12.16
申请人
HITACHI LTD
发明人
HONDA MINORU
分类号
G01R31/26;H01L21/48;H01L21/66
主分类号
G01R31/26
代理机构
代理人
主权项
地址
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