| 摘要 |
IMPROVED SATURABLE REACTOR-TYPE POWER SUPPLY An improved power supply of the saturable reactor type is disclosed. The improvement is the inclusion of a variable impedance means, such as a pair of opposed semiconductor rectifiers, in series with the current winding of the saturable reactor. Also included is an electronic means for changing the impedance of the variable impedance means, such as a control circuit for monitoring an operating parameter and for enabling or disabling the firing of the semiconductor controlled rectifiers in response to a change in the operating parameter. A preferred embodiment of the power supply also includes a transformer and a rectification means for supplying high-voltage, direct current to a sputtering apparatus. |
