| 摘要 |
PURPOSE:To provide a stand jig described in the title which scarcely winds up product deposited on the inside wall of a reaction tube, by making warped parts, which curve in such a manner that they are apart from the inside wall of the reaction tube, on the stand jig for specimens at the front and rear ends along the moving direction, the jug which slides in the reaction tube of a horizontal CVD furnace. CONSTITUTION:Not all product of gas phase chemical reaction deposit on the surface of a specimen 4, but major portion of the product deposits on the jig 3 or on the inside wall of the tube, only a portion depositing on the specimen 4 surface. The product deposited on the inside wall of the tube is adhered weakly, so that when the jig 3 is drawn off the reaction tube, the product deposited on the inside wall of the tube is wound up, and a portion of the wound up product falls on the specimens 4 surfaces to form contaminant, deteriorating the CVD membrane. JIg body 3 provided with warped parts 7 at the front and rear ends in the moving direction never winds up products deposited on the inside wall of the tube because it slides as a sledge slides on snow even when the jig advances in the tube in the direction of an arrow 8. |
