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发明名称
PRODUCTION OF SEMICONDUCTOR ELEMENT
摘要
申请公布号
JPS5455173(A)
申请公布日期
1979.05.02
申请号
JP19770121512
申请日期
1977.10.12
申请人
TOKYO SHIBAURA ELECTRIC CO
发明人
MAEKAWA RIYOUICHI
分类号
H01L21/283;H01L21/316
主分类号
H01L21/283
代理机构
代理人
主权项
地址
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