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经营范围
发明名称
SEMICONDUCTOR CLEANSING METHOD
摘要
申请公布号
JPS5452984(A)
申请公布日期
1979.04.25
申请号
JP19770119586
申请日期
1977.10.04
申请人
NIPPON ELECTRIC CO
发明人
WATANABE AKIRA
分类号
H01L21/304;H01L21/302
主分类号
H01L21/304
代理机构
代理人
主权项
地址
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