发明名称 DEFECT JUDGING METHOD OF QUADRILATERAL PATTERNS
摘要 PURPOSE:To detect the minute defects of the angles of quadrilateral patterns at high sensitivity by obtaining the vertexes of the quadrilateral patterns and operating any of at least the length of the sides, length of the diagonal lines or the crossing angle of the diagonal lines based thereon thereby performing judgement of the presence or not aof any minute defect.
申请公布号 JPS5428688(A) 申请公布日期 1979.03.03
申请号 JP19770094223 申请日期 1977.08.08
申请人 HITACHI LTD 发明人 OKAMOTO KEIICHI
分类号 G01N21/88;G01B11/24;G01N21/94;G01N21/956;H01L21/027;H01L21/66 主分类号 G01N21/88
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