| 发明名称 |
EDGE PROCESSING METHOD IN PATTERN TEST |
| 摘要 |
PURPOSE:To reduce the capacity of the error position memory and thus to shorten the test time by eliminating the errors which are detected mistakenly at the pattern edge part when the pattern is tested and drawing out only the desired error information. |
| 申请公布号 |
JPS5427370(A) |
申请公布日期 |
1979.03.01 |
| 申请号 |
JP19770092157 |
申请日期 |
1977.08.02 |
| 申请人 |
OLYMPUS OPTICAL CO |
发明人 |
SAKAMOTO MASAHARU |
| 分类号 |
G01B11/00;G01B11/26;G01N21/88;G01N21/94;G01N21/956;G03F1/84;H01L21/027;H01L21/302;H01L21/66 |
主分类号 |
G01B11/00 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
