| 摘要 |
PURPOSE:To improve the opposing position alignment accuracy of both surfaces of a substrate by a method wherein two each of fixing pins are provided on upper and lower X sides of the substrate while another fixing pin is provided on Y side of the same. CONSTITUTION:Fixing pins 4,5 are provided on the X side 3 end of a substrate holder 2 with vacuum suction holes 1. Another fixing pin 9 is provided on a more distant position than the position 8 bisecting a substrate 7 in the Y direction. The other fixing pins 12, 13 are provided on the Y side 6 opposing to the X side symmetrically with the pins 5, 4 using the line in the X direction passing the fixing pin 9 as a symmetrical axis. The substrate 7 is pressed down onto the fixing pins 4,5 and 9 for masking using a surface photo mask 20 with oblique line part patterns 18 and alignment marks 19 to be exposed. Next, the substrate 7 is made upside-down to press down respective sides onto the fixing pins 9, 12, 13. Finally, the oblique line parts are exposed using another back surface mask 20 provided in the direction reverse to that of the surface. |
