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发明名称
VAPOR PHASE MULTILAYER EPITAXIAL GROWTH METHOD
摘要
申请公布号
JPS5413771(A)
申请公布日期
1979.02.01
申请号
JP19770079353
申请日期
1977.07.01
申请人
NIPPON ELECTRIC CO
发明人
MUNEDA TAKAAKI
分类号
C30B25/02;H01L21/205
主分类号
C30B25/02
代理机构
代理人
主权项
地址
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