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发明名称
MANUFACTURE FOR SEMICONDUCTOR DEVICE
摘要
申请公布号
JPS548481(A)
申请公布日期
1979.01.22
申请号
JP19770073212
申请日期
1977.06.22
申请人
HITACHI LTD
发明人
NIINO KAORU
分类号
H01L29/80;H01L21/331;H01L21/337;H01L21/8222;H01L21/8248;H01L27/06;H01L29/72;H01L29/73;H01L29/76;H01L29/808
主分类号
H01L29/80
代理机构
代理人
主权项
地址
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