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经营范围
发明名称
CHARGED PARTICLE BEAM MACHINING DEVICE
摘要
申请公布号
JPS541496(A)
申请公布日期
1979.01.08
申请号
JP19770065737
申请日期
1977.06.06
申请人
OSAKA TRANSFORMER CO LTD
发明人
OKADA AKIYUKI;NEMOTO YOUICHI
分类号
H01J37/30;B23K15/06
主分类号
H01J37/30
代理机构
代理人
主权项
地址
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