| 摘要 |
PROBLEM TO BE SOLVED: To automatically convey a reticle to a reticle library of a light- exposing device. SOLUTION: A reticle case is conveyed from a reticle stocker to a light- exposing device by a reticle case unattended conveying robot moving in a clean room. The light-exposing device comprises reticle case conveying devices 40, 41 and a reticle case postponing device 42 inside a chamber 31, and the reticle conveying device receives a reticle case from the reticle case unattended conveying robot at a reticle case transfer location and once conveys the reticle case to the reticle case positioning device 42 to position, and conveys the positioned reticle case to a reticle holding device (a reticle library), whereby the reticle case can be inserted into the reticle holding device with specific location precision. The reticle held in the reticle holding device is automatically conveyed to a light-exposure system reticle stage by a conventional reticle conveying device. |
