| 摘要 |
PURPOSE:To suppress power loss by connecting a controller with a high frequency power source and a matching unit and grasping the power actually consumed through a load based on positional information fed from the matching unit. CONSTITUTION:A controller 14 for determining the power actually fed to a load 12 is connected with a high frequency power source 11 and a matching unit 13. A signal corresponding to the high frequency power source 11 for feeding the matching unit 13 is fed to the controller 14 together with a signal corresponding to the capacities of capacitors Ci, Cc and a signal corresponding to the current flowing through the inductance L of the impedance matching unit 13, then they are subjected to operation. Then the power for the load obtained through operation is compared with a set value and a power set signal for nullifying the difference is fed to the high frequency power source 11 thus grasping the actually consumed power accurately at all times. By such arrangement, power loss can be suppressed. |
