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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPS53148968(A)
申请公布日期
1978.12.26
申请号
JP19770064410
申请日期
1977.05.31
申请人
MATSUSHITA ELECTRIC IND CO LTD
发明人
HATADA KENZOU;KAJIWARA KOUSEI
分类号
H01L21/60;H01L21/28
主分类号
H01L21/60
代理机构
代理人
主权项
地址
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