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发明名称
METHOD OF AND APPARATUS FOR LIQUID PHASE EPITAXIAL GROWTH
摘要
申请公布号
JPS53147684(A)
申请公布日期
1978.12.22
申请号
JP19770062750
申请日期
1977.05.31
申请人
FUJITSU LTD
发明人
SEKI KATSUJI
分类号
C30B19/00;H01L21/208
主分类号
C30B19/00
代理机构
代理人
主权项
地址
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