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发明名称
ELECTRON BEAM MASK AND PRODUCTION OF THE SAME
摘要
申请公布号
JPS53144675(A)
申请公布日期
1978.12.16
申请号
JP19770058877
申请日期
1977.05.23
申请人
NIPPON TELEGRAPH & TELEPHONE
发明人
TAKAMOTO KIICHI;KOYABU KUNIO;MIMURA YOSHIAKI;YOSHIHARA HIDEO
分类号
H01L21/027;H01L21/302
主分类号
H01L21/027
代理机构
代理人
主权项
地址
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