| 摘要 |
Thin film electrical resistors comprised of a substantially homogeneous amorphous chromium-silicon-oxygen alloy having an empirical formula of CrxSiyOz wherein X is a number in the range of about 0.3 to 0.39, y is a number in the range of about 0.4 to 0.52 and x is a number in the range of about 0.1 to 0.30, with the proviso that some of x, y and z is equal to 1. Such resistors exhibit a relatively high ohmic resistance in the range of about 2,000 to 16,000 mu OMEGA xcm. |
