| 摘要 |
<p>A method for reducing a metal chloride, especially for reducing a sublimable metal chloride by using a metallic reducing agent. A device for storing the starting metal chloride is connected to a separate reducing device through a connection pipe in which a gas flowmeter is provided, and the storage device and the reducing device are heated by separate heat sources, respectively. The metallic reducing agent is heated and kept at a temperature higher than the melting point of the metal and brought into contact with the vapor of the starting metal chloride to cause the reducing reaction The reaction is effected while measuring and controlling the flow rate of the starting metal chloride vapor to the reducing device by the gas flowmeter.</p> |
