| 摘要 |
PURPOSE:To reduce the occurrence rate of troubles such as short circuits of an analog circuit and to prevent the analog circuit from deteriorating in characteristics due to a parasitic capacitance by a method wherein an island-like or a channel-like blank part is provided to the uppermost conductive film of a shield electrode which protects the analog circuit from noises. CONSTITUTION:A second layer conductive film 3 of an analog circuit forms a shield electrode and is provided with many island-like blank parts 4-00-4-38 formed in meshes. Provided that a harmonic component of noises has a frequency of 1GHz and is 30cm in wavelength, the meshes shield an electromagnetic wave sufficiently if the meshes are formed to be 100mum in pitch and a pitch space is 1/3000 of the wavelength. Even if pinholes 5-1-5-3 have occurred to an interlaminar insulating film 1b, the occurrence of a short circuit between a first layer wiring 6 and the second layer conductive film 3 becomes small in probability. |
