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发明名称
PRODUCTION OF MOS TYPE SEMICONDUCTOR DEVICES
摘要
申请公布号
JPS53129982(A)
申请公布日期
1978.11.13
申请号
JP19770045318
申请日期
1977.04.19
申请人
MATSUSHITA ELECTRIC IND CO LTD
发明人
OOSONE TAKASHI;TSUJI KAZUHIKO;HORIUCHI SHIROU
分类号
H01L29/78;H01L21/28;H01L29/417
主分类号
H01L29/78
代理机构
代理人
主权项
地址
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