| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method of an electromechanical conversion member that can suppress a change in characteristics due to a change in temperature to stabilize the characteristics of a piezoelectric material, in relieving stress through driving the piezoelectric material by application of voltage.SOLUTION: A manufacturing method of an electromechanical conversion member includes the step of holding an electromechanical conversion member at a holding temperature higher than a normal temperature, the electromechanical conversion member including a piezoelectric element 16 having a lower electrode 161, a piezoelectric material 162, and an upper electrode 163 formed in this order on a diaphragm 15, and changing the holding temperature gradually to a low temperature while driving the electromechanical conversion member by application of voltage.SELECTED DRAWING: Figure 1 |
