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发明名称
PRODUCTION OF SEMICONDUCTOR UNIT
摘要
申请公布号
JPS53123658(A)
申请公布日期
1978.10.28
申请号
JP19770038859
申请日期
1977.04.04
申请人
NIPPON ELECTRIC CO
发明人
SHIYOUJI SATORU
分类号
H01L21/306;H01L21/22
主分类号
H01L21/306
代理机构
代理人
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