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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPS53123672(A)
申请公布日期
1978.10.28
申请号
JP19770038866
申请日期
1977.04.04
申请人
NIPPON ELECTRIC CO
发明人
HONMA MICHIO
分类号
H01L21/66;H01L23/48
主分类号
H01L21/66
代理机构
代理人
主权项
地址
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