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发明名称
IMPURITY DIFFUSING METHOD
摘要
申请公布号
JPS53123070(A)
申请公布日期
1978.10.27
申请号
JP19770037944
申请日期
1977.04.02
申请人
FUJI ELECTRIC CO LTD
发明人
SATOU NORITADA;MIYAGI MASAHIDE
分类号
H01L21/223;H01L21/22
主分类号
H01L21/223
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代理人
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