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发明名称
IMPURITY DIFFUSING METHOD
摘要
申请公布号
JPS53114349(A)
申请公布日期
1978.10.05
申请号
JP19770027983
申请日期
1977.03.16
申请人
HITACHI LTD
发明人
NANBA MITSUO
分类号
H01L21/223
主分类号
H01L21/223
代理机构
代理人
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地址
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