| 发明名称 |
FORMING METHOD FOR FILM OF AMORPHOUS MATERIAL |
| 摘要 |
PURPOSE:To obtain a photoelectric conversion target having few white flaw by making discharge take place during or after deposition through evaporation in oxygen atmosphere in the case of forming film of amorphous material including arsenic. |
| 申请公布号 |
JPS53113781(A) |
申请公布日期 |
1978.10.04 |
| 申请号 |
JP19770028009 |
申请日期 |
1977.03.16 |
| 申请人 |
TOKYO SHIBAURA ELECTRIC CO |
发明人 |
YOSHIDA OKIO;HAYASHIMOTO YOSHIAKI;CHIYOUEI ISAO |
| 分类号 |
H01J9/12;C23C14/00;C23C14/06;C23C14/08;C23C14/24;C23C14/58 |
主分类号 |
H01J9/12 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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