发明名称 MOSFET TRANSISTOR AND METHOD OF FABRICATION
摘要 <p>An n channel MOSFET transistor which includes doping of previously formed source and drain elements with a heavy diffusion of phosphorous or arsenic creating n++ regions in the source and drain. The extra diffusion step is preferably accomplished just prior to contact metalization.</p>
申请公布号 CA1038967(A) 申请公布日期 1978.09.19
申请号 CA19750221639 申请日期 1975.03.06
申请人 INTEL CORPORATION 发明人 WATROUS, WILLIS G. (JR.)
分类号 H01L29/78;H01L21/00;H01L21/22;H01L21/336;H01L23/485;H01L29/00;H01L29/08;(IPC1-7):01L21/22;01L29/94 主分类号 H01L29/78
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