| 摘要 |
A probe station having a cryogenic container preferably situated in a vacuum chamber. Semiconductor devices to be tested are attached to the container of cryogenic liquid. Electrical contact to the devices is made using contact wires which are moved by manipulators lying outside the vacuum chamber. Integrity of the vacuum at the manipulators is assured by using bellows to allow for the movement of the contact wires. Visual placement of the contact wires on the devices to be tested is accomplished with the aid of a microscope external to the vacuum. One end of the vacuum chamber is made of clear plastic to be used as the microscope viewing window. A spring is used external to the vacuum space to counteract the effects of atmospheric pressure on the movable bellows. The semiconductor devices are then tested by the connection of the appropriate test equipment to the electrical contact wires. As a result thereof, semiconductor devices can be reliably and effectively tested under the same pressure and temperature at which they are operable.
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