| 发明名称 |
PHOTOORESIST DOUBLEEFACE PHOTOSENSITIZING DEVICE |
| 摘要 |
PURPOSE:To halve the conventional whole length of a photo-sensitizing device so as to miniaturize it by dividing the conventional straight optical path into two parallel ones, and refracting them with a right angle prism finally in order to project on both faces of a photosensitive body. |
| 申请公布号 |
JPS53100228(A) |
申请公布日期 |
1978.09.01 |
| 申请号 |
JP19770014263 |
申请日期 |
1977.02.14 |
| 申请人 |
HITACHI LTD |
发明人 |
TOKI HISASHI;TANAKA NOBUKATSU |
| 分类号 |
H01L21/30;G03F7/20;H01L21/027 |
主分类号 |
H01L21/30 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
