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发明名称
ELEKTRONENSTRAHLGERAET MIT STRAHLFLECKFORMUNG
摘要
申请公布号
DE2805371(A1)
申请公布日期
1978.08.24
申请号
DE19782805371
申请日期
1978.02.09
申请人
INTERNATIONAL BUSINESS MACHINES CORP.
发明人
CHRISTIAN PFEIFFER,HANS;MEADE RYAN,PHILIP;VICTOR WEBER,EDWARD
分类号
H01J37/147;H01J37/09;H01J37/30;H01L21/027;(IPC1-7):H01J37/30
主分类号
H01J37/147
代理机构
代理人
主权项
地址
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