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经营范围
发明名称
MASTER SLICE SYSTEM
摘要
申请公布号
JPS5391681(A)
申请公布日期
1978.08.11
申请号
JP19770005957
申请日期
1977.01.24
申请人
HITACHI LTD
发明人
KIKUCHI MICHIO
分类号
H01L29/78;H01L21/82;H01L21/822;H01L27/04;H01L27/118
主分类号
H01L29/78
代理机构
代理人
主权项
地址
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