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发明名称
PRODUCTION OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPS5387163(A)
申请公布日期
1978.08.01
申请号
JP19770001483
申请日期
1977.01.12
申请人
HITACHI LTD
发明人
MARUYAMA YASUO
分类号
H01L21/02;H01L21/30;H01L21/31;H01L21/316;H01L27/12
主分类号
H01L21/02
代理机构
代理人
主权项
地址
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