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发明名称
PRODUCTION OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPS5383459(A)
申请公布日期
1978.07.22
申请号
JP19760159187
申请日期
1976.12.28
申请人
FUJITSU LTD
发明人
SUGISHIMA KENJI
分类号
H01L21/225;H01L21/28;H01L21/302;H01L21/3065;H01L21/312
主分类号
H01L21/225
代理机构
代理人
主权项
地址
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